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Impedance analysis of nano thickness layered AlGaN acoustic sensor deposited by thermionic vacuum arc

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Özet

In this study, AlGaN acoustic sensor was deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method for the first time. Gallium materials are used in many applications for optoelectronic device and semiconductor technology. Thermionic vacuum arc is the deposition technology for the variously materials and applications field. The thickness of the acoustic sensor is in deposited as nano layer. Impedance analyses were realized. Also, TVA production parameters and some properties of the deposited layers were investigated. TVA is a fast deposition technology for the gallium compounds and doped gallium compounds. Obtained results show that AlGaN materials are very promising materials. Moreover, these acoustic sensors have been produced by TVA technology.

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https://rdlopen.rawdatalibrary.net/r/bayburt/12557Resmi atıflarda kullanılan kalıcı adres
DOI
https://doi.org/10.1063/1.4944267Yayıncı resmi DOI adresi
İndeks kayıtları
ScopusScopusWeb of ScienceWeb of Science
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Scopus
1
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OpenAlex
1
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Tam Kayıt
AlanDeğerDil
dc.contributor.authorÖzen, Soner
dc.contributor.authorBilgiç, Eyüp
dc.contributor.authorGülmez, Gülay
dc.contributor.authorŞenay, Volkan
dc.contributor.authorPat, Suat
dc.contributor.authorKorkmaz, Şadan
dc.contributor.authorMohammadigharehbagh, Reza
dc.contributor.editorAkkus, B.
dc.contributor.editorDogan, G.S.
dc.contributor.editorMutlu, R.B.C.
dc.contributor.editorYalcin, L.S.
dc.contributor.editorOktem, Y.
dc.date.accessioned2026-10-29T19:09:43.671932093Z
dc.date.available2026-10-29T19:09:43.671932093Z
dc.date.issued2016
dc.description.abstractIn this study, AlGaN acoustic sensor was deposited on aluminum metal substrate by thermionic vacuum arc (TVA) method for the first time. Gallium materials are used in many applications for optoelectronic device and semiconductor technology. Thermionic vacuum arc is the deposition technology for the variously materials and applications field. The thickness of the acoustic sensor is in deposited as nano layer. Impedance analyses were realized. Also, TVA production parameters and some properties of the deposited layers were investigated. TVA is a fast deposition technology for the gallium compounds and doped gallium compounds. Obtained results show that AlGaN materials are very promising materials. Moreover, these acoustic sensors have been produced by TVA technology.
dc.identifier.articlenumber240005
dc.identifier.doi10.1063/1.4944267
dc.identifier.isbn978-073541369-6
dc.identifier.issn0094-243X
dc.identifier.scopus2-s2.0-84984573052
dc.identifier.urihttps://rdlopen.rawdatalibrary.net/r/bayburt/12557
dc.identifier.volume1722
dc.identifier.wosWOS:000375923300148
dc.language.isoen
dc.publisherAmerican Institute of Physics Inc.
dc.relation.conference9th International Physics Conference of the Balkan Physical Union, BPU 2015
dc.relation.ispartofAIP Conference Proceedings
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subject.classificationPhysics, Applied
dc.subject.classificationPhysics
dc.subject.otherTHIN-FILM DEPOSITION
dc.subject.otherPHYSICAL-PROPERTIES
dc.subject.otherGLASS
dc.subject.otherTVA
dc.subject.otherSUBSTRATE
dc.subject.otherENERGY
dc.titleImpedance analysis of nano thickness layered AlGaN acoustic sensor deposited by thermionic vacuum arc
dc.typeConference Object
rdl.citation.openalex1
rdl.citation.scopus1
rdl.citation.wos1
rdl.conference.date24 August 2015 through 27 August 2015
rdl.conference.placeIstanbul
rdl.oa.statusclosed
rdl.source.indexSCOPUS
rdl.source.indexWOS
rdl.wos.indexConference Proceedings Citation Index - Science (CPCI-S)