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ZnO thin film synthesis by reactive radio frequency magnetron sputtering

BildiriYalnız künyeScopus SJRQ1

Özet

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples.

Anahtar Kelimeler

Optical propertiesRF sputteringSurface propertiesZnO
RDL Kalıcı Bağlantı (PID)
https://rdlopen.rawdatalibrary.net/r/bayburt/13790Resmi atıflarda kullanılan kalıcı adres
İndeks kayıtları
ScopusScopusWeb of ScienceWeb of Science
Kaydın indeks veri tabanlarındaki sayfası (aktarımda alınan kayıt numarasıyla). Erişim, indeksin kendi koşullarına bağlıdır.
Atıflar
Scopus
55
WoS
49
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Tam Kayıt
AlanDeğerDil
dc.contributor.authorŞenay, Volkan
dc.contributor.authorPat, Suat
dc.contributor.authorKorkmaz, Şadan
dc.contributor.authorAydoʇmuş, Tuna
dc.contributor.authorElmas, Saliha
dc.contributor.authorÖzen, Soner
dc.contributor.authorEkem, Naci
dc.contributor.authorBalbaʇ, M. Zafer
dc.date.accessioned2026-10-29T19:11:27.837464560Z
dc.date.available2026-10-29T19:11:27.837464560Z
dc.date.issued2014
dc.description.abstractIn this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples.
dc.description.sponsorshipESOGU
dc.description.sponsorshipTUBİTAK, (108M608, 201219026)
dc.identifier.doi10.1016/j.apsusc.2013.10.044
dc.identifier.eissn1873-5584
dc.identifier.endpage5
dc.identifier.issn0169-4332
dc.identifier.scopus2-s2.0-84908361207
dc.identifier.startpage2
dc.identifier.urihttps://rdlopen.rawdatalibrary.net/r/bayburt/13790
dc.identifier.volume318
dc.identifier.wosWOS:000344380500002
dc.language.isoen
dc.publisherElsevier B.V.
dc.relation.conference9th Nanoscience and Nanotechnology Conference (NANOTR)
dc.relation.ispartofApplied Surface Science
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectOptical properties
dc.subjectRF sputtering
dc.subjectSurface properties
dc.subjectZnO
dc.subject.classificationChemistry, Physical
dc.subject.classificationMaterials Science, Coatings & Films
dc.subject.classificationPhysics, Applied
dc.subject.classificationPhysics, Condensed Matter
dc.subject.classificationChemistry
dc.subject.classificationMaterials Science
dc.subject.classificationPhysics
dc.subject.otherAtomic force microscopy
dc.subject.otherEnergy gap
dc.subject.otherII-VI semiconductors
dc.subject.otherMagnetron sputtering
dc.subject.otherMetallic films
dc.subject.otherNanocrystals
dc.subject.otherOptical films
dc.subject.otherOptical properties
dc.subject.otherSubstrates
dc.subject.otherSurface properties
dc.subject.otherZinc oxide
dc.subject.otherDeposited films
dc.subject.otherGlass substrates
dc.subject.otherNano-crystalline structures
dc.subject.otherReactive radio-frequency magnetron sputtering
dc.subject.otherReactive rf magnetron sputtering
dc.subject.otherRf-sputtering
dc.subject.otherUV-Vis spectrophotometers
dc.subject.otherZnO thin film
dc.subject.otherThin films
dc.titleZnO thin film synthesis by reactive radio frequency magnetron sputtering
dc.typeConference Object
rdl.citation.scopus55
rdl.citation.wos49
rdl.conference.dateJUN 24-28, 2013
rdl.conference.placeErzurum, TURKEY
rdl.oa.statusclosed
rdl.scopus.quartileQ1
rdl.source.indexSCOPUS
rdl.source.indexWOS
rdl.wos.indexScience Citation Index Expanded (SCI-EXPANDED)
rdl.wos.indexConference Proceedings Citation Index - Science (CPCI-S)